TECHNICAL SPECIFICATIONS

 

 

Process chamber

Material: aluminium

Inside dimensions: 500 x 400 x 445 mm

Volume: 89 liter

Tray: 2, with dimensions 360 x 255 mm

Vacuum measurement

Baratron gauge

Generator

Custom design for Nanofics application

Pumping system

Dry pump group

PLC

PLC with touch screen

The PLC:

-          runs the process automatically

-          defines different processes as recipes

-          checks pump pressure, pump time, gas flow, working pressure, process time, temperature, forward power of the generator

-          monitors all parameters correctly within preset %
of the machine settings

-          uses an operator, process/maintenance password

Electricity

380V AC, 50Hz, 40A

Process gas

1 gas line with MFC (Mass Flow Controller)

Safety features

Emergency-off-switch, vacuum interlock, over temperature interlock, CE-label

Process gas connection

¼’’-Swagelok-fitting, input pressure 1 Bar

 


Options
: data logging, additional gas channels, customised loading tray