TECHNICAL SPECIFICATIONS


 

Process chamber

Material: aluminium Inside dimensions: 300 x 300 x 300 mm Volume: 27 liter Tray: 3, with dimensions 205 x 260 x 40 mm

Vacuum measurement

Pirani gauge

Generator

300 W kHz

Pumping system

Rotary vane roughing pump

PLC

PLC with touch screen The PLC: -          runs the process automatically -          defines different processes as recipes -          checks pump pressure, pump time, gas flow, working pressure, process time, temperature, forward power of the generator -          monitors all parameters correctly within preset %
of the machine settings
-          uses an operator, process/maintenance password

Electricity

380V AC, 50Hz, 40A

Process gas

1 gas line with MFC (Mass Flow Controller)

Safety features

Emergency-off-switch, vacuum interlock, over temperature interlock, CE-label

Process gas connection

¼’’-Swagelok-fitting, input pressure 1 Bar

 

Options: data logging, additional gas channels, dry pump group, customised loading tray