Process chamber

Material: aluminium

Inside dimensions: 400 x 400 x 400 mm

Volume: 64 liter

Tray: 4, with dimensions 305 x 360 x 40 mm

Vacuum measurement

Pirani gauge


600 W kHz

Pumping system

Rotary vane roughing pump


PLC with touch screen

The PLC:

-          runs the process automatically

-          defines different processes as recipes

-          checks pump pressure, pump time, gas flow, working pressure, process time, temperature, forward power of the generator

-          monitors all parameters correctly within preset %
of the machine settings

-          uses an operator, process/maintenance password


380V AC, 50Hz, 40A

Process gas

1 gas line with MFC (Mass Flow Controller)

Safety features

Emergency-off-switch, vacuum interlock, over temperature interlock, CE-label

Process gas connection

¼’’-Swagelok-fitting, input pressure 1 Bar


: data logging, additional gas channels, dry pump group, customised loading tray