TECHNICAL SPECIFICATIONS

 

 

 

Process chamber

Material: aluminium

Inside dimensions: 600 x 600 x 600 mm

Volume: 216 liter

Tray: 5, with dimensions 552 x 522 x 40 mm

Vacuum measurement

Pirani gauge

Generator

1000 W kHz

Pumping system

Rotary vane roughing pump

PLC

PLC with touch screen

The PLC:

-         runs the process automatically

-         defines different processes as recipes

-         checks pump pressure, pump time, gas flow, working pressure, process time, temperature, forward power of the generator

-         monitors all parameters correctly within preset %
of the machine settings

-         uses an operator, process/maintenance password

Electricity

380V AC, 50Hz, 40A

Process gas

1 gas line with MFC (Mass Flow Controller)

Safety features

Emergency-off-switch, vacuum interlock, over temperature interlock, CE-label

Process gas connection

¼’’-Swagelok-fitting, input pressure 1 Bar

 


Options
: data logging, additional gas channels, dry pump group, customised loading tray


Options
: data logging, additional gas channels, dry pump group, customised loading